Ulvac Entron-EX W300

Ref : 2553339-9-CP

Condition : Used

Manufacturer : Ulvac

Model : Entron-EX W300

Year(s) : 2006

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Last check : 12 Dec. 2023

-De-installed, warehoused, can be inspected by appointment
-Was in working condition prior to de-installation
-Parts included: EFEM, Main Body, 3x PVD Chamber, 1x PC, Parts and Racks
-See attached photos for details of the current condition.

-Pumps: Shimadzu MP403LM and MP2003LM (Chamber pumps)
-Load Ports: Rorze BMM9-CLB-19095-61-11 qty 3
-Vacuum Robots: KRC-4000Z qty 2
-CHILLER 1: IASON
-CHILLER 2: UNISEM RCS500B
Process chambers:
F4 DC PSU TYPE HPK 15ZI QTY 2
R1 DC PSU TYPE HPK 15ZI QTY 2
R2 DC PSU TYPE HPK 15ZI QTY 2
R3 DC PSU TYPE HPK 15ZI QTY 2

Missing/Broken parts: None recorded
System Power Rating: 3 Phase,AC200V, 142A, 49 KVA 50/60 Hz
Fab Interface Configuration: 3 Load Ports

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