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Toho FLX-2320-S Thin Film Stress MeasurementSystem
Ref :
2016126-9-GO
Condition :
Used
Manufacturer :
Toho
Model :
FLX-2320-S
Short Description :
Thin Film Stress MeasurementSystem
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
26 Nov. 2019
Description
Calculation of biaxial modulus of elasticity, linear expansion coefficient, stress uniformity, and file subtraction.
• Trend plotting for Statistical Process Control (SPC).
• Calculation of water diffusion coefficient in dielectric films.• Automatic recalculation of stress when film or substrate thickness is corrected.
• 2-D and 3-D views of wafer topography.
• Plotting of the measured stress-temperature curve
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