Tencor P-17

Wafer Size 8"
Tool's Condition Refurbishing

Step height: Nanometers to 1000µ;m
Step height repeatability : 4 Å; ( 1σ, 1µ;m )
Programmable stylus force from 0.5 –; 50mg (Option : 0.03 ~50mg )
Scan full diameter of the sample without stitching for bow and film stress measurement
Fully motorized 200mm XY stage, Z stage, 360° theta stage and level stage
Dual view optics ( side and top )
Fully automated with sequencing, pattern recognition

[Applications]
- Step Height mesurement (2D/3D)
- Roughness and Waviness
- Bow and Shape
- Thin film Stress
- Defect review ( Defect surface topography)

*. To be refurbished.
*. Installed in Clean-room.