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TEL, Tokyo Electron Alpha-8SE-Z
Ref :
2646026-9-CP
Condition :
Used
Manufacturer :
TEL, Tokyo Electron
Model :
Alpha-8SE-Z
Year(s) :
2007
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Vertical Furnace for LPCVD SOD Process
Version: 200 mm
Vintage: 01.06.2007
Vintage 2007.01
Software OS Linux
Process SOD
Type LP-CVD
Heater VOS-40-017 3471206Z2164
Three phase power 208V
Single phase power 120V
AIR VALVE FUJIKIN, CKD
MFC,MFM STEC
MAIN CKD
APC CKD
GAS N2,P-N2,O2,H2
Missing parts: None
De-installed and warehoused
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