TEL Alpha 8 SEi
ASIA (North East)
- Furnace Cabinet (with Scavenger)
- Heater chamber (5 zone, up to 1200C Long Life)
- Power Supply Unit, Control Unit
- Primary Power Unit
- Furnace Monitor
- Built In SMIF
- Auto Door
- Boat Elevator
- Auto Tube Shutter
- Main Controller (Waves)
- Temperature Controller
- Utility Cabinet, Power Box
Description
- Alpha-type Wafer Load Automation
- Wafer Counter
- 21 Carrier Sotkcers
- Gas Unit HT Pyro (N2, O2, H2. DCE)
- External Torch with N2 Dilution
- Inner Thermocouple for ratio Mix
- N2 Purge Seal
- TEL Standard GEM Interface
- Pitch Change Mechanism
- Equipment Engineering Capability
- Optional Equipment Engineering Capabilities
- Vane type Flow meter
- Pressure Digital Display Switch (SCV EXH & Gas box) & Digital PCW Flow meter system
- CE Marking Safety