Tegal 903e, Oxide

Ref : 1236333-9-W

Condition : Used

Manufacturer : Tegal

Model : 903e, Oxide

Year(s) : -

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Last check : 26 Mar. 2021

Manufacture : Tegal
Model : 903e

Specification:
used
Application : Oxide

Wafer Size : 6"

Operational Manuals
electronics Schematics & Spare Parts Drawing included

-Main system ; 44"W x 42"D x 26"H
500 lbs , 208 VAC, 30 Amp, 1 phase
-RF Generator CGA 10
-Pump (D30AC)
-Terminal Monitor / Keyboard
-Temp. Contorller (2 ea)

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