Suss MicroTec FALCON - ACS 200

Wafer Size Range
Minimum 50 mm
Maximum 200 mm
Number of Photoresist Develop Stations 1
Number of Photoresist Dispenses 2
Number of Vapor Prime Hot Plates 1
Number of Hot Plates 5
Number of Chill Plates 4
Number of Cassette Elevators 2
Wafer Backside Rinse YES
Wafer Handling Standard Robot
Mini-Environment YES
Accessories
MAXIPEC-3000 Air conditioning and filtration unit specifically designed for Falcon system providing class 10 environment.
Other Information
System is configured for both 4" and 6" wafers.
(2) Standard Robots
(12)Wafer storage postions