Suss MA150e

- Topside Alignment (TSA)
- Automatic Mask Aligner
- Cassette to cassette operation
- Can be used in either Automatic or Manual Mode
- AL3000 Automatic Alignment
- Cognex 8100 Pattern Recognition Software for automatic alignment of the mask to substrate patterns.
- Capable of aligning patterns of nearly any shape or design with alignment accuracies of less than 1.0µm
- Prealigner Type: XRS
- Auto Align option installed
- Operating System: Windows 2000
- Lamphouse: 1000 Watt Lamphouse
- Exposure Optics: UV400 Optics (365nm/405nm exposure)
- Power Supply: CIC1200
- Microscope: DVM6 Microscope
- Single Objective: Configured to fit customer requirement (5x, 10x, or 20x)
- Vacuum Chuck: Configured to fit customer requirements
- Maskholder: Configured to fit customer requirements
- Capable of Hard, Soft, Proximity, and Vacuum Contact Exposure Modes (with appropriate tooling)
- Brand New Ushio 1000W Lamp included
- Operations Manual for Suss MA150
- System Power: 208/230V
- Refurbished to excellent condition