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Speedfam Auriga C
Ref :
2700234-9-CP
Condition :
Used
Manufacturer :
Speedfam
Model :
Auriga C
Year(s) :
1999
Quantity :
1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
Oxid Prozess
Wafer edge cleaner,
EVCII PC, SW 8.601
Conditioner new type
Flowcontroller für Slurry #2,
additional Carrier rinse option
CLC DI and chemical option at Wafer cleaner station
Wafer Size Range
Minimum 200 mm
Set Size 200 mm
Cassette to Cassette YES
Software Revision Level SW 8.601
Condition Good
Power Requirements 480 V 75.0 A 50 Hz 3 Phase
CE Marked YES
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