Signatone S 463-E

Wafer Size Range
Minimum 50 mm
Maximum 150 mm
Microscope Type Microzoom
X-Y Optics Motion YES
Vacuum Chuck
Diameter 6.0000 in (152.40 mm)
Plating Material Stainless steel
Vacuum Required 30.00 in Hg (761.99 mm Hg)
Motorized Stage YES
Probe Card Holder YES
Description Analytical Wafer Prober
Power Requirements 120 V 10.0 A 60 Hz 1 Phase
Exterior Dimensions
Width 23.000 in (58.4 cm)
Depth 25.000 in (63.5 cm)
Weight 404 lb (183 kg)