Semitool

Semitool SST C321280 Spray Solvent Tool

* Cabinet: Stainless Steel, Thru-the-Wall, Class 1
* Mfg date new was 2000
* Gen-2 build
* Front local interface (standard)
* Tool side touch screen
* EMO (Front and Rear)
* Bottom fed facilities
* Top fed exhaust
* 2 Heated tanks for NMP based processing (standard)
* 2 IPA tanks (non heated)
* 280 Bowl (accommodates 8" (200mm) substrate-low profile)
* Encapsulated Ferrofluidic drive seal
* Kalrez bowl seal
* N2 purged dedicated chemical and DI water spray manifolds
* Dedicated TFE N2 dry manifold
* Grphic color controller
* Prcess variable control of RPM
* Heated chemical temperature