Semitool ST 460S

Substrate Size 5"
Wafer Size 150 mm
Rotors Included YES
Controller Type Microprocessor Controller Type
Controller Model PSC101
Resistivity Monitor YES
Rotor Model A182-39-LMB
Built-In Resistivity Monitor Included
SRD Configuration Single Stack
Bowl diameter: 9.78"
Single recipe
Integrated resistivity monitor
Single bolt rotor
Power Requirements 115 V 15.0 A 50/60 Hz 1 Phase

Exterior Dimensions
Width 14.500 in (36.8 cm)
Depth 24.000 in (61.0 cm)
Height 54.000 in (137.2 cm)