Semitool ST-240D

Substrate Size 75mm
Wafer Size Range
Maximum 75 mm
Controller Type Microprocessor Controller Type
Controller Model 328
Built-In Resistivity Monitor Not Included
SRD Configuration Double Stack
Other Information
Top Unit:
Rotor: A72-40MB-0215, 4 bolt.
Anti static probes

Lower Unit:
Rotar: A72-40MB-0215, 4 bolt
Power Requirements 120 V 15.0 A 60 Hz 1 Phase
Exterior Dimensions
Width 14.000 in (35.6 cm)
Depth 26.000 in (66.0 cm)
Height 46.000 in (116.8 cm)
Weight 232 lb (105 kg)