Semitool ST-240D

Wafer Size Range
Maximum 75 mm
Anti Static Probes YES
Heated Nitrogen YES
Rotors Included YES
Controller Type Microprocessor Controller Type
Controller Model 328
Rotor Diameter 5.00 in (12.70 cm)
Built-In Resistivity Monitor Not Included
SRD Configuration Double Stack
Other Information Top Rotor: A82M, SO# 14993, H-Bar-IN, Bal. 0-4 GaAs Wafers Slot 2'4'9'11, 2800 RPM Max., 4 Bolt
Bottom Rotor: A82M-64A02, H-Bar-IN, Bal. 0-25, Quartz, 2800 RPM, 4 Bolt
Power Requirements 120 V 15.0 A 60 Hz 1 Phase
Exterior Dimensions
Width 14.000 in (35.6 cm)
Depth 26.000 in (66.0 cm)
Height 46.000 in (116.8 cm)
Weight 232 lb (105 kg)