SE-6003 Analysis Manual Prober

Brand Astrodesign

Main specifications
・Stage movement: X200mm, Y200mm
・Substage movement amount: X13mm, Y13mm
・Chuck size: Standard chuck ~8 inches
Low temperature chuck ~8 inches
・Wafer holding method: Vacuum suction method
・Set temperature: -40℃ to +125℃ (Cooling medium: water. Ethanol mixed solution)
・Microscope support tower chilled angle: Approximately 10 degrees from horizontal
・Prober external dimensions: Approximately W440 x D700 x H550mm
・Weight: Approximately 65 kg (approximately 250 kg including shield box anti-vibration table)
・Power supply: AC100V, 50/60Hz

【Commodity composition】
・Prober body
・Standard chuck and low temperature chuck 1 each
・Temperature controller: AT-6602
・Stereomicroscope: SZ40 (manufactured by Olympus) objective lens 110AL1.5 x, eyepiece x 30
・Microscope illumination power supply: TL3 (manufactured by Olympus)
・Cooling water circulation device: CA-2500 (manufactured by Tokyo Rikakikai)
・Cooling water pump: HPP-1100 (manufactured by Tokyo Rikakikai)
・Shield box (external dimensions: approx. W800 x D900 x H1570, H2150mm when opened)

*Compressor and vacuum pump are not included.
*Micro positioner can be included at an additional cost. Please contact us
[Device status]
・Instruction manual included
- The temperature display of the chiller and controller has been confirmed
to operate up to approximately 120 degrees on the high temperature side
and approximately 5 degrees on the low temperature side.