Samco RIE-1C

Parallel plate reactive ion etcher, cathode coupled
upper Anode: Aluminum, 140mm diameter, showerhead
lower Cathode: stainless steel, 120mm diameter, water cooled
200mm diameter quartz chamber x 62mm high
viewing port
13.56mhz 500w ENI power supply
manual matching network
Edwards E2M12 vacuum pump
2 gas inlet lines with rotameters, 50 SCCM for CF4 and O2, one N2 purge line
process timer
fully auto operation of vacuum sysem, valves, and RF
operation and maintenance manuals included