Samco PXA-100KM

Plasma cleaning machine
Reaction chamber: Approximately W350 x D260 x H100mm
View port (φ20mm) installed in front of reaction chamber
Transport method: No transport mechanism; workpieces are placed manually
by the operator
Electrode structure: RIE method
Upper electrode: Ground electrode (anode electrode)
Lower electrode: Powered electrode (cathode electrode)
High frequency power supply: 13.56MHz crystal oscillation solid state type MAX 1KW
Model: NAH-1013-1AP (manufactured by JRC)
Matching method: Full automatic matching method
Model: NFC-130-1P(manufactured by JRC)
Exhaust system: 1670L/min
Model: EV-S20A (manufactured by EBARA)
Control system: Sequence controller (manufactured by OMRON)
Operation system: touch panel operation utility
・Compressed air: 0.5-0.7Mpa
・Purge gas: N2 0.2MPa Flow rate: 30L/min
・Process gas: O2 0.1Mpa Ar 0.1MPa
・Cooling water (chamber): 0.1~0.2MPa Flow rate: 30L/min
・Cooling water (vacuum pump): Flow rate: 1.5 to 3,0L/min
・Power supply: 3φ AC200V 60Hz 5KVA

External dimensions: Book body: Approximately W1380 x D820 x H2050mm (excluding protrusions, H includes signal tower)
Control panel: approx. W800 x D400 x H700mm

*It is necessary to apply to the Director-General of the General Communications Bureau
of the Ministry of Internal Affairs and Communications,
which has jurisdiction over the location where the device will be installed,
and obtain an application for permission for high frequency equipment.
[Device status]
*Instruction manual and specifications are included.
*The power supply is 60Hz specification.
*The dry pump has been overhauled.