Rudolf S300D Ultra II Ellipsometer

Thin Film Measurement Tool / Ellipsometer
Version: 300 mm
Vintage: 01.05.2005
-Deinstalled to the warehouse from working condition
-See attached photos for details
The S200-ultra/S300-ultra series is a
transparent film metrology system.
Its capabilities include automated measurements of
low-k and ultra-low-k films, ultra-thin ONO and
nitrided oxide gates, thin silicon dioxide gates under polysilicon,
polysilicon, and organic ARCs.
This tool is fitted with qty 2 off Brooks Fixload 6 Wafer Loading Ports