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Plasma Activate 3200

Ref : 2610323-9-CP
Condition : Used
Manufacturer : Plasma
Model : Activate 3200
Year(s) : 2018
Quantity : 1
Location : Seller or machines location:
EUROPE (Western and Northern)

Low pressure Plasma etcher, for roll to roll casstettes, 40 KHz, 5000W, adjustable time, pressure and power. chamber inner sizes 1200 x 1200 x 2200mm WxHxD, machine outside measures 3200 x 2550 x 3300mm WxHxD, chamber volume 3168 Liter, gases O2,Ar,N2. Vacuum pumps Ebara EV-S200P and Sogevac SV300

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