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Oxford PLASMALAB 100 RIE SYSTEM
Ref :
2708152-9-W
Condition :
Used
Manufacturer :
Oxford
Model :
PLASMALAB 100 RIE SYSTEM
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
- Up to 8"/200mm wafer handling
- Allows small batch processing for R&D and Pilot Production
- Load-locked System
- Computer, Keyboard, New Flat Panel Monitor
- System Chiller
- Turbo Pump
- Load Lock Pump
- Operations Manual and Documentation
- Offered as Fully Refurbished and Meeting Original Specifications
Gas Module currently set up for the following gases (Capable of 6 Gases):
- Ar
- O2
- Cl2
- SiCl4
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