OWLS-1800DV2H Optical Sputter Coater System

OPTORUN OWLS-D OPTICAL SPUTTER COATER SYSTEM consisting of:
- Model: OWLS-1800DV2H
- Vacuum Chamber: W2540mm×H265×D2285mm (SUS304)
- Base Plate Fixture Size: Ф375mm (Circle shape)×t5mm
- Base Plate Rotating Speed: 10~100 rpm (usually 80rpm)
- Target Size: Ф142×H630 Ti x2 pairs + Nbx2 pairs
- ICP Reaction Source: RF power supply 5 kW x 2 sets
- Transmission System: Double-arm vacuum mechanical arm

Used for wafer-level optical components, and suitable for plating of:
- Anti-reflection film
- High-reflection film
- Hard film - Color film
- Conductive film and Insulating layer on various optical glass and
silicon wafers and other optical and semiconductor applications

Cathode Power Supply:
- Bipolar MF power supply 24kW x 2 set
- High pulse power supply 20KW×2 set