Others

Brand: Technos
Technos
Model
Trex 610 T
Wafer Size
6 to 8 inch
Conation Id
384
Configuration
Technos Trex 610 TA Analyzer Spectrometer - Spectrometer, 6"-8"
W-Lb and Mo-Ka excitation sources
TXRF for wafer surface micro metallic contamination monitoring
DDRA type W_Lb source
Sealed Tube type Mo source
Water Chiller for DDRA cooling
W-Lb DDRA and Mo-Ka irradiations
Dedicated water chiller and LN2 generator
W target; monochromated W-Lb1; Direct Drive Rotating Anode (DDRA) based
12 KW X-ray generator for W excitation
Mo target; monochromated Mo-Ka; Sealed Tube
3KW X-ray generator for Mo excitation
Si(Li) detector with counting circuit
Control electronics with micro-computer
Wafer handling system for 8" and 6" wafer
Complete qualitative and quantitative software
Water Chiller for DDRA and Sealed Tube cooling
PC system