Amc 7700

AMC 7700 EPI Reactor

Wafer Size 6"
*. Process: Epilayer growth on silicon wafer
*. Operational at the time of de-installation,To be refurbished
*. Wafer Size
- 100mm(4") ~ 150mm(6")
*. Reactor system configuration:
- Staubli Robot
- Lift & Roation Assembly
- Process chamber Assembly
- Lower Exhaust Assembly
- Lamp Assembly
- Cassette Handler Assembly
- Power Distribution Assembly
- Circuit Breaker Assembly
- GasPanel Assembly & Leaksensor
- Heat Exchanger Assembly
- Rearframe Assembly
- Pneumatics Bay Assembly
- Recirculation Blower Assembly
- Laminar Flow Blower Assembly
- SCR Compartment Assembly
- Nine-Zone SCR Interface Assembly
- IR Lamp Assembly
*. Control console configuration:?
- VME Cardcage Assembly
- VME Power supply Assembly
- Console I/O Channel Assembly
- HCL/H2 Leak Detector Assembly
- Mass Storage / SECS Interface
- Monitor bass Assembly & Lightpen
*. Utility & power
- power requirements 480V 3ph 10A(Max20A) 50/60hz , 5.5 KVA
- Exhaust / D.I Waetr /Cooing Water/ AIR / Vacuum
- Process Gas H2/N2/HCL/SIH2CL2 or SIH2CL3/PH3