Ontrak Synergy Wafer Scrubber

Includes: Brush Box Refurbishment, Chemical line replacement,
full cleaning and replacement of all wear items
including but not limited to Belts, hoses, O-rings, seals, and/or solenoids/valves.
New spin bowl, spindle assembly and spin nest.
Configuration
• 200mm (8-inch), Si wafers, Notched.
• 110V, Single Phase, 60 HZ
• CPU 30
• Standard Robot orientation
• CE Style spin nest
• Edge Clean Option
• Solid State Hard Drive
• 2.3.8 Software, Y2K Compliant
• Megasonic Option
• Three color Light tower
• SECS-GEM
• Thru-the floor facilities