Olympus MX-80 Wafer Inspection Microscope

Olympus MX-80 Wafer Inspection Microscope
Motorized Stage for up to 300mm Wafers
Bright/Darkfield Optics:
5X, 20X & 50X Neo SPlan NIC, 100X MSPlan and 150X MDPlan Objective Lenses
Interference Contrast Optical System
Trinocular Viewing Head with Color CCD Camera & Monitor

Microscope Type Upright
Microscope Configuration Brightfield, Darkfield & DIC
Illumination Type Reflected Light
Trinocular/Phototube Provided YES
Wafer Size 300.00 mm (11.81 in)
Motorized Nosepiece YES
Multiple Objectives Models
5X, 20X & 50X Neo SPlan NIC
100X MSPlan
150X MDPlan
Infinity Corrected Objectives YES
Polarizer YES
Analyzer YES
Power Supply Included YES

Wafer Stage/Loader
Manufacturer Ludl Electronic Products
Wafer Size 300.00 mm (11.81 in)
Stage Type Coaxial X-Y, Rotary
Camera
Type Color CCD
Camera Controller
Controller Included YES