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Oerlikon Clusterline 300

Ref : 254376
Condition : Used
Manufacturer : Oerlikon
Model : Clusterline 300
Year(s) : 2006
Quantity : 1
Location : Seller or machines location:
United States (USA)
Last check : 26 Feb. 2025

Wafer Size 300 mm
Fab Section Thin Film

General Product Information
Vendor Supplier UNAXIS
Model Oerlikon Unaxis Evatec Clusterline 300
Vintage 2006
Asset Description Sputter Tool 300mm (P7766)
Software Version Evatec 4.10.1
CIM SECS/GEM
Process PVD

Hardware Configuration (Subfab / Auxilliary Units)
Busch BC100 pumps 2
Neslab Chiller SWX100 1
Power Rack 1
Cryo Compressor/ FC 2

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