1/1
Oerlikon Clusterline 300
Ref :
2698220-9-FM
Condition :
Used
Manufacturer :
Oerlikon
Model :
Clusterline 300
Year(s) :
2006
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Wafer Size 300 mm
Fab Section Thin Film
General Product Information
Vendor Supplier UNAXIS
Model Oerlikon Unaxis Evatec Clusterline 300
Vintage 2006
Asset Description Sputter Tool 300mm (P7766)
Software Version Evatec 4.10.1
CIM SECS/GEM
Process PVD
Hardware Configuration (Subfab / Auxilliary Units)
Busch BC100 pumps 2
Neslab Chiller SWX100 1
Power Rack 1
Cryo Compressor/ FC 2
Other machines similar to Oerlikon Clusterline 300
1
Oxford Plasmalab 100 ICP
Location :
AMERICA North (USA-Canada-Mexico)
1
2 Fuji NXTIIC M6
Location :
AMERICA North (USA-Canada-Mexico)
Year(s) :
2014
1
TEL U2E-855DD
Location :
AMERICA North (USA-Canada-Mexico)
Year(s) :
1997
1
TEL Alpha-808S
Location :
AMERICA North (USA-Canada-Mexico)
Year(s) :
1996