Oerlikon Clusterline 300

Ref : 254376

Condition : Used

Manufacturer : Oerlikon

Model : Clusterline 300

Year(s) : 2006

Quantity : 1

Location : Seller or machines location:
United States (USA)

Last check : 26 Feb. 2025

Wafer Size 300 mm
Fab Section Thin Film

General Product Information
Vendor Supplier UNAXIS
Model Oerlikon Unaxis Evatec Clusterline 300
Vintage 2006
Asset Description Sputter Tool 300mm (P7766)
Software Version Evatec 4.10.1
CIM SECS/GEM
Process PVD

Hardware Configuration (Subfab / Auxilliary Units)
Busch BC100 pumps 2
Neslab Chiller SWX100 1
Power Rack 1
Cryo Compressor/ FC 2

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