Nikon NSR-S208D

Wafer Size 300 mm
Fab Section Lithography

General Product Information
Vendor Supplier NIKON
Model NSR-208D
Vintage 2008
Asset Description NIKON Main Body
Software Version MCSW ver.180-P12/OCSW ver180- P10
CIM SECs
Process KRF

Hardware Confguration (Fab)
Main System Main Body 1 OK
Factory Interface SMIF 1 OK

Hardware Confguration (Subfab / Auxilliary Units)
Gigaphoton laser(GP Laser) 1 OK
Amp Rack 1 OK
Temperature Controller 1 OK
Air Conditioner 1 OK