N&K Technology 5700 CDRT

N&K 5700 CDRT Metrology system

Broadband spectrometry for film thickness and trench profile measurements on photomask reticles.

Spotsize: R = 50um, T < 400um
The n&k 5700-CDRT automated system is designed for handling 5” or 6” square masks.

The n&k 5700-CDRT simultaneously determines thickness, n and k in the spectral range of 190-1000nm, and trench profile. These systems provide non-destructive, real time, high throughput measurements directly on the device and collect polarized reflectance and transmission data (in the spectral range from 190-1000 nm) at the same point. These systems encompass advanced pattern recognition software, patented microspot measurement technology and a unique all-reflective optical based system.

This system includes a polarizer and special trench analysis software and provides non-destructive, real-time measurements of CD, trench depth, and profile.