Mattson SHS 1000VAC, Rapid Thermal Processor
AMERICA North (USA-Canada-Mexico)
Brand: Mattson
Model: SHS 1000VAC
RAPID THERMAL PROCESSOR
Specifications
- Used
- Rapid Thermal Processor (product: SHS, 208VAC, 3Ph, 60Hz, 43kW) looks
to be in cosmetic condition, showing some signs of wear
- It is missing one of the back doors
- One of the rack-mount chassis on the back of the system was partially
pulled out when I received it, and the cover was removed
- Upon closer inspection, some of the wires have been disconnected from the back of this module
- I lack the knowledge and equipment to formally test this system, and it is being sold as-is
- It comes with a box of accessories, including spare cables, valves, boards, etc., as shown
- It includes two spare quartz chambers and two 100mm quartz wafer trays, as well as four manuals, as shown
- One of the quartz chambers has a small chip out of one of its edges,
and the tube on the top has been partially broken on the end (please see the photos for detail)
- This system comes with everything shown in the photos
- I do not have any additional parts or accessories for it
- If you do not see it in the photos, it is not included
- Approximate overall unpacked dimensions: 62"H x 50"W x 75"L