March PX500
Ref :
2470133-9-W
Condition :
Used
Manufacturer :
March
Model :
PX500
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
28 Jun. 2024
Features
Stainless Steel chamber taking wafers to 4”
13.56 MHz frequency; power output up to 600 W
Microprocessor-controlled
Recipe editor for fast, versatile parameter control
2 mass flow controllers (O2 and N2)
Key Applications and available processes
Photo-resist stripping
Wafer descum/cleaning
Etching of passivation layers
Cleaning of filters and membranes
Chemical trace analysis
MEMS
Photonics
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