Leica IN3000

Wafer Sizes: 8"/200mm
Wafer defect inspection The Leica INS 3000 is
the new defect review and inspection station.
The all stainless-steel system features a
fully automatic integrated microscope,
including UV and Confocal, and universal wafer handler.
The design priorities of the INS 3000 are ergonomy,
cleanliness, automation and user-friendliness.
The characteristics of the system are 1 to 3 cassette front loading,
including SMIF, and a newly developed Windows™ NT
based graphical user interface.