Lam Research Sabre FX

Ref : 2686524-9-FM

Condition : Used

Manufacturer : Lam Research

Model : Sabre FX

Year(s) : 2011

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Wafer Size 300 mm
Fab Section CMP

General Product Information
Vendor Supplier LAM
Model Sabre Excel converted to Sabre FX
Vintage 2011
Asset Description MPX2650FP NEW SABER EXCEL 300 (MT)
Software Version 5.70B155
CIM NFA - Compliant to SEMI standards E120, E125, E132, E134 Advanced FA.
Process Electroplate

Hardware Configuration (Fab)
Main System Mainframe 1 OK
Handler System robot
Options System 6 Chm on board anneal 1 OK
Factory Interface FOUP

Hardware Configuration (Subfab / Auxilliary Units)
Thermofisher 10K 1 chiller OK

Missing/Faulty Parts / Accesorries List
CS lift/tilt drivers, controllers 3

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