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Lam Research Novellus Speed
Ref :
2686208-9-FM
Condition :
Used
Manufacturer :
Lam Research
Model :
Novellus Speed
Year(s) :
2000
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Wafer Size 200 mm
Fab Section Thin Film
General Product Information
Vendor Supplier Lam Research
Model Novellus Speed
Vintage 2000
Asset Description Novellus Speed
Software Version 2.37B24
CIM SECS
Process USG
Hardware Confguration (Fab)
Main System Novellus Speed OK
Handler System Mag7 1 OK
Missing/Faulty Parts / Accesorries List
Ebara 150W-M 3
Ebara AA70W-N 2
SMIF LPI 2
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