Lam Research Novellus Speed

Ref : 254145

Condition : Used

Manufacturer : Lam Research

Model : Novellus Speed

Year(s) : 2000

Quantity : 1

Location : Seller or machines location:
United States (USA)

Last check : 26 Feb. 2025

Wafer Size 200 mm
Fab Section Thin Film

General Product Information
Vendor Supplier Lam Research
Model Novellus Speed
Vintage 2000
Asset Description Novellus Speed
Software Version 2.37B24
CIM SECS
Process USG

Hardware Confguration (Fab)
Main System Novellus Speed OK
Handler System Mag7 1 OK

Missing/Faulty Parts / Accesorries List
Ebara 150W-M 3
Ebara AA70W-N 2
SMIF LPI 2

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