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LAM 2300 Metal H

Ref : 2658919-9-FM
Condition : Used
Manufacturer : LAM
Model : 2300 Metal H
Year(s) : 2005
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Transaction Information
Tool ID EE-EME-03
Wafer Size 300 mm
Fab Section Etch

General Product Information
Vendor Supplier Lam
Model 2300 Metal H
Vintage 2005
Process Metal ETCH

Hardware Confguration (Fab)
Main System Chambers 4
Handler System Brooks Robot (ATR8 & MAG7) 1
Factory Interface FOUP 3

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