LAM 2300 Metal H
Ref :
2658919-9-FM
Condition :
Used
Manufacturer :
LAM
Model :
2300 Metal H
Year(s) :
2005
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Transaction Information
Tool ID EE-EME-03
Wafer Size 300 mm
Fab Section Etch
General Product Information
Vendor Supplier Lam
Model 2300 Metal H
Vintage 2005
Process Metal ETCH
Hardware Confguration (Fab)
Main System Chambers 4
Handler System Brooks Robot (ATR8 & MAG7) 1
Factory Interface FOUP 3
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