KLA-Tencor

KLA / Tencor AlphaStep 500 Profilometer

* Computer controlled Scanning and data collection
* Comprehensive data analysis software
* Intuitive user interface
* Application-specific recipes easily programmed
* High resolution VGA monitor
* Zoom optics with magnification up to 210x
* Multi-scan average mode scans up to 10 times and then
averages the scan before print out
* Powerful Data Analysis w/ up to 30 standard surface
parameters selections
* Step Height Measurement Range:Maximum 10 Å, Step
Height Resolution 25.00 Å, Other 21 mm (0.82")
* Maximum Thickness: 10 mm (400 mil) Scan Length 300
um (12 mil)/25 Angstrom (1 uin)
* Vertical Resolution 1-100 mg