KLA-Tencor VIPER 2410

KLA-Tencor's 2401 Automated Macro Defect Inspection System

Wafer Size 8"
- Replacing the manual bright light macro defect inspection performed by operators.
- Automated detection, classification and reporting of all yield- critical macro after-develop inspection defect types,
including hotspots, scratches, large particles, extra and missing resist, unexposed fields, striations, developer spots and splashback.
- With sensitivity superior to that of operators, the 2401 Automated Macro Defect Inspection System detects defects reliably and repeatably, allowing disposition decisions to be made quickly and accurately, dramatically reducing scrap and preventing further investment in low-yielding wafers.