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KLA-Tencor UV1280SE

Ref : 2693779-9-FM
Condition : Used
Manufacturer : KLA-Tencor
Model : UV1280SE
Year(s) : 1999
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Wafer Size 200 mm
Fab Section Metrology

General Product Information
Vendor Supplier KLA Tencor
Model UV1280SE
Vintage 1999
Asset Description PEA816
Software Version Summit 2.61
CIM SECS
Process Film thickness measurement tool

Hardware Confguration (Fab)
Main System Main body 1 OK
Factory Interface SMIF 1 OK
Handler System Robot & Pre-aligner 1 OK

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