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KLA-Tencor UV1280SE
Ref :
254147
Condition :
Used
Manufacturer :
KLA-Tencor
Model :
UV1280SE
Year(s) :
1999
Quantity :
1
Location :
Seller or machines location:
United States (USA)
United States (USA)
Last check :
26 Feb. 2025
Wafer Size 200 mm
Fab Section Metrology
General Product Information
Vendor Supplier KLA Tencor
Model UV1280SE
Vintage 1999
Asset Description PEA816
Software Version Summit 2.61
CIM SECS
Process Film thickness measurement tool
Hardware Confguration (Fab)
Main System Main body 1 OK
Factory Interface SMIF 1 OK
Handler System Robot & Pre-aligner 1 OK
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