KLA-Tencor Surfscan 6420

Automatic Surface Inspection System
›Vaccum: 6mm (0.25 in.) line – 500mm (20 in.) of Hg / flow rate 0.24 l/s
›Ducted Venting: two 100mm (4 in.) exhaust hoses
›Power: 200-240V, 50/60 Hz, 2kVA
Environment: ≥Class 10
Condition Very Good
Power Requirements 200-240 V 50 Hz
Exterior Dimensions
Width 29.921 in (76.0 cm)
Depth 40.945 in (104.0 cm)
Height 66.142 in (168.0 cm)
Weight 728 lb (330 kg)