KLA-Tencor Surfscan 6420 Particle Inspection System

KLA-TENCOR SURFSCAN 6420 PARTICLE INSPECTION SYSTEM consisting of:
Model: Surfscan 6420
Particle inspection system
Substrate/Sizes: 2", 3", 4", 6" and 8" Wafer Capable
Substrate Thickness: Adjustable up to 12 mm.
Material: any surface that scatters less than 90% of incident light
Cassette Handling: Single puck handling from single cassette or platform.
Defect Sensitivity: Most Surfaces: Better than 0.12 um
(depending upon surface quality).
Defect Sensitivity: Polished Silicon:
Better than 0.12 um at 95% capture rate.
Illumination Source: 30 mW Argon-Ion laser, 488 nm wavelength
Operating Software: Windows 98 Operating Software
Operations Manual and Documentation