KLA-Tencor Surfscan 6200

Particle Inspection System
Max Wafer Capable: 8”/200mm
System configured for 8“/200mm wafers
Defect Sensitivity: 0.12um
Defect Map and Histogram with Zoom
Haze Map and Histogram with Zoom
Argon Ion Laser (488nm)
2D Signal Integration
Software:
+ Microsoft Windows 98, Version 4.2
+ Software Enhancement
+ Computer Upgrade
Pentium Computer
Software Capable for Wafer Map and Histogram
Parallel Printer Port
Blower Box
SECS II Communication Port
Operations Manual and Documentation
Power Supply will fit to the Customer Location
One backup hard drive supplied to customer
6 Month Warranty on Parts and Labor
(Laser warranty is 6 months or 5000 hours whichever comes
first, Puck is not covered under warranty)

KLA-TENCOR SURFSCAN 6200 REFURBISHMENT PROCESS consists of:
- Replace used Laser with New Laser
- Replace used Photomultiplier Tubes (PMTs) with
Brand New PMTs, as required
- Replace used Power Supply, as required
- Replacement or repair of any bad Circuit Board
- Mechanical assemblies cleaned, lubricated, rebuilt,
or replaced as needed
- Optics assemblies cleaned and aligned to
meet performance specs or replaced as needed
- Electronic assemblies tested to
meet performance specifications or replaced as needed
- Puck assembly rebuilt or replaced (if applicable)
- Calibrate system using calibration wafers
- Machine covers are cleaned, polished, or replaced, as needed
- System transport locks installed; system prepared for
shipment
- Refurbishment carried out by KLA-Tencor Trained Technicians
- Windows OS