KLA-Tencor AIT I Patterned Surface Defect Inspection System

KLA-TENCOR AIT I PATTERNED SURFACE DEFECT INSPECTION SYSTEM consisting of:
- Model: AIT I Main System
- KLA-Tencor AIT I Mainframe
- Currently Configured for 6"/150mm & 8"/200mm Wafers
- Double Darkfield Inspection Tool
- SECS II/GEM Communication Interface
- Low Contact Chuck (AIT I)
- Multi Channel Collection Optics System with
Independent Programmable Spatial Filters
- Pentium CPU with Windows NT Installed
- Wafer Transfer Area Housing Cover
- Wafer Handling Module
- High Voltage Electronics
- Front and Rear EMO’s with Covers
- Flat Panel Display for AIT
- Fold Down Keyboard Tray with Built In Mouse
- X/Y Drive/Controller Chassis and Motion Controller Card
- Blower Box (exhaust hoses not included)
- Operations Manual and Documentation