KLA-Tencor Spectra Film LD10

Wafer Size 300 mm
Fab Section Metrology

General Product Information
Vendor Supplier COMPLAIN
Model Spectra Film LD10
Vintage 2015
Asset Description Spectroscopic Thickness Tool
Software Version 6.20.34.11002
CIM SECS
Process Metrology

Hardware Configuration (Fab)
Main System Wafer Thickness (BOW) 1
Main System Broadband Spectroscopic Ellipsometry OK 1
Main System White Light Reflectometry OK
Handler System Phoenix EFEM 2
Factory Interface FOUP
Main System iDesorber OK
Main System Stress Measurement 1
Main System UltraViolet Reflectometry 1 OK