KLA-Tencor Prometrix UV-1050

Thin film measurement tool
Broadband UV optics
Dual beam spectrophotometry
Wafer sizes: 100mm, 150mm, and 200mm
Stage resolution: xy - 0.25µm, z - 0.025µm
Focus: Automatic focus on measurement site
Source: Broadband Xenon Arc Lamp
Imaging System: Color Camera
Applications include polysilicon, UV reflectivity, and
simultaneous oxide and TiN thickness for CMP applications
Windows NT
Summit Software with GUI
Simultaneous multilayer and ESML measures over 500 discrete wavelengths
Operations Manual for UV-1050

CONDITION:
Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.