KLA, Tencor P16+ Surface profiler

Surface Profiler
Version: 200 mm
Vintage: 01.06.2011
Voltage kit: 90-230v
Power cord
Universal chuck: 8"
Productivity Package 1
Profiler 2D Software
Apex 2D surface analysis s/w
20 site Sequencing software
80 mm scan length
Microhead 5 SR (standard range) measurement head
Vertical range: 0-327µm
Stylus force: 0.5 - 50mg
Constant stylus force control
Dual view optics (side view and top view)
4.0X, 0.12NA top view objective lens (1400 x 1040 µm field of view)
Black and white digital camera
Stylus 2.0 µm 60 degree radius
Sample stage with motorized level and rotation, 8" diameter table
Vacuum sample hold-down
PC with XP Profesional Operating System
2.6 GHz Intel Dual CORE processor
1 GB of RAM
80GB hard disk drive
16X DVD+/-RW drive
Six USB 2.0 (two front, four rear) and one Ethernet (RJ45) ports
19" Flat Panel LCD monitor
2011- 2012 vintage.