KLA-Tencor P-22

- Automated Surface Profilometer
- Wafer Size: 8"/200mm
- Automated Wafer Handler
- 1 Open Loader for 200mm
- Computer Controlled
- Scan Method: Moving Stage, Stationary Stylus
- Scan Length: 205mm (8 inches)
- Scan Speed: 1 μm/sec to 25 mm/sec (0.04 mil/sec to 1 in/sec)
- Sampling Rate: 50, 100, 200, 500, 1000 sample/sec nominal
- Vertical Ranges
- Resolution: ±3.2 μm / 0.5 Å (±0.13 mil/0.002 μin), ±13 μm / 2 Å (±0.51 mil/0.008 μin), 130 μm / 10 Å (±5.1 mil/0.04 μin)
- Vertical Linearity: ±0.5% above 2000 Å, 10 Å below 2000 Å
- Stylus Control: Programmable Force
- MHII Range: 0.05-50 mg
- Resolution: 0.1 mg
- Programmable Descent Rate
- Dual View Optics
- Side View Optics 150-600x
- Top View Optics 185-750x and 300-1200x (with User Interchangeable Lens)
- Operations Manual