KLA-Tencor P-15

- Up to 8"/200mm wafer capable
- Computer controlled
- Measures roughness, waviness, step height, and other surface characteristics
- Automatic measurement capability
- Measurement of vertical features ranging from under 100Å (0.4 min.) to approximately 300 µm (11 mils), with a vertical resolution of 0.5, 2, or 10Å.
- Photo-realistic rendering of the scan data in three dimensions for extended surface analysis.
- A virtually unlimited number of data points per profile guarantee that the horizontal resolution is limited by the stylus radius and not by the number of data points.
- Measurement of many roughness and waviness parameters, with user-selectable cutoff filters to isolate roughness and waviness.
- Ability to fit and level a scan, allowing accurate step height measurements on curved surfaces.
- Ability to detect the edge or apex of a profile feature, allowing automated data analysis relative to the feature.
- Ability to repeat a scan up to ten times and automatically calculate the average, thereby minimizing the effects of environmental noise on measurements.