KLA-Tencor EDR 5210
Ref :
254086
Condition :
Used
Manufacturer :
KLA-Tencor
Model :
EDR 5210
Year(s) :
2010
Quantity :
1
Location :
Seller or machines location:
United States (USA)
United States (USA)
Last check :
26 Feb. 2025
Wafer Size 300 mm
Fab Section Metrology
General Product Information
Vendor Supplier KLA-TENCOR
Model EDR 5210
Vintage 2010
Software Version Window
CIM Linked
Process Defect Review
Hardware Confguration (Fab)
Handler System Wafer Transfer Robot 1
Handler System Loadport 2
Main System Main Tool 1
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