KLA-Tencor EDR 5210

Ref : 254086

Condition : Used

Manufacturer : KLA-Tencor

Model : EDR 5210

Year(s) : 2010

Quantity : 1

Location : Seller or machines location:
United States (USA)

Last check : 26 Feb. 2025

Wafer Size 300 mm
Fab Section Metrology

General Product Information
Vendor Supplier KLA-TENCOR
Model EDR 5210
Vintage 2010
Software Version Window
CIM Linked
Process Defect Review

Hardware Confguration (Fab)
Handler System Wafer Transfer Robot 1
Handler System Loadport 2
Main System Main Tool 1

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