KLA-Tencor Archer A500 AIM

Wafer Size 300 mm
Fab Section Metrology

General Product Information
Vendor Supplier KLA
Model Archer A500 AIM
Vintage 2014
Asset Description KLA-Archer A500 AIM
Software Version 16.12.00.30400
CIM SECS/GEM
Process Overlay

Hardware Confguration (Fab)
Factory Interface FOUP 3 OK
Options System Variable Illumination Spectrum 1 OK
Options System Enhanced MAM 1 OK
Main System Archer A500 AIM 1 OK
Handler System Phoenix 300MM LCM Triple Handler 1 OK
Options System Multi-Location Target 1 OK
Options System AIMid Option 1 OK
Options System uAIM Measurement Capability 1 OK

Hardware Confguration (Subfab / Auxilliary Units)
EATON 9130 UPS 1 OK

Missing/Faulty Parts / Accesorries List
Description Quantity
Bad Y-Axis Stage
Encoder