KLA-Tencor Aleris 8350 Advanced Film Metrology Tool

Wafer Size Range
Minimum 300 mm
Maximum 300 mm
Set Size 300 mm
Illumination Source Type Multi-wavelength Source
Multi-Layer Film Capacity YES
Micro Spot Optics YES
Scanning Stage YES
Wafer Mapping YES
Condition Excellent
Power Requirements 208/230 V 16.0 A 50/60 Hz 1 Phase

Dual 300 mm Loadports
Wafer Level Reliability
Broadband Spectroscopic Ellipsometer
Single Wave Ellipsometer
Stress Measurement
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