KLA-Tencor AIT II

Wafer Size: 200mm
150/200mm Open Handler
Software Version 5.3.17.4
Double Darkfield Inspection Tool
SECS II / GEM Communication Interface
Vacuum Chuck / Locator for 200mm Wafers
Multi Channel Collection Optics System with Independent Programmable Spatial Filters
Comes with Standard 10um Spot Sizes and also includes two expensive upgrades 5um and 7um Spot Sizes
Wafer Transfer Area Housing Cover
Wafer Handling Module
Blower Box (exhaust hoses not included)
Operations Manual and Documentation

CONDITION:
Excellent Condition Guaranteed.
3 Month Warranty and Full Specifications Guarantee.